Pfeiffer Vacuum+Fab Solutions, a Busch Group company, has expanded its portfolio of turbomolecular pumps with the addition of the ATH 4506 M. With a pumping speed of 4,500 l/s for nitrogen, it is the most powerful model in the ATH-M series. The new pump is particularly suitable for applications with high gas throughput, such as in semiconductor production, the evacuation of large vacuum chambers, or large-area coating.
Plug-and-play thanks to integrated controller
The ATH 4506 M has an integrated controller, eliminating the need for external control units. This simplifies installation, reduces space requirements, and enables a quick system start. The turbo pump reaches its rated speed of 23,500 rpm within nine minutes. An integrated energy-saving mode also reduces power consumption during downtime.
Flexible temperature management for different processes
To meet different process requirements, the ATH 4506 M is available in two versions: an unheated version for clean, non-corrosive processes such as large-area coating, and a version with a temperature management system up to 90 °C. The latter is designed for corrosive applications such as semiconductor manufacturing and reduces condensation and particle formation inside the pump.
Digital condition monitoring and high robustness
Internal sensors continuously monitor parameters such as temperature, speed, flushing conditions, and mechanical movements. This data enables real-time condition monitoring and supports predictive maintenance. Thanks to its IoT capability, the ATH 4506 M can be integrated into digital production and monitoring systems.