With the new HiQuad Neo mass spectrometer, Pfeiffer Vacuum combines high performance, flexibility and simple operation. The mass spectrometer achieves a high measuring speed of up to 125 μs/u. It is characterized by very good sensitivity and a large dynamic range. Depending on the application, different mass ranges, rod diameters, ion sources, detectors, interfaces and cable lengths can be selected. These features make the HiQuad Neo particularly suitable for applications in research and development, integration into analysis systems and cleanliness verification for EUV lithography.
One click for leak detection
The mass spectrometer is easy to operate with the help of the PV MassSpec software. The software offers a clear and user-friendly platform for recording and displaying measurement data and parameter sets. With the integrated sequencer, complete measurement sequences can be programmed easily and automatically. One click is all it takes to carry out leak detection and vacuum diagnostics. The software also enables automated calibration and tuning. It is easy to define measurement recipes and link mass spectrometric data with external signals. It is possible to use some existing components from the previous generation, such as the analyzer. This reduces costs and waste.