Rapidly emerging markets with high technical requirements are placing more and more emphasis on outstanding cleanliness, as molecular impurities have a negative impact on the functionality of their products. In the field of EUV lithography, for example, these are defined by the "Generic Standards" GSA 07 1221 & GSA 07 2221. The key to ensuring product quality therefore lies in the correct determination of the residual gas content. This is possible with OmniGrade, the new customer-specific system from Pfeiffer Vacuum.
OmniGrade meets the specific testing requirements. A configuration comprises two or three chambers. It consists of the spectrometer chamber, in which the mass spectrometer is positioned, and a measuring chamber, in which the samples are placed during the measurement. An airlock chamber to minimize system background and sample transport by an automatic transfer system is optionally available. OmniGrade has been designed for a small footprint and easy integration with the latest interfaces. Cleanroom compatibility is also possible.