W&L: Bulk sputtering of precious metals

Abstract

In order to achieve a higher degree of coating efficiency, the bulk material in this sputtering system lies directly on a special tube designed as a target and is continuously circulated by its rotation during the coating process.

Layers produced by sputtering are particularly efficient for large-format, flat surfaces. However, if complex-shaped surfaces are to be sputtered, high material losses occur as the material is also sputtered beyond the edges of the components. In order to make the coating of small, complex-shaped parts with precious metals economical, the target and coating yield must be maximized. Special sputtering systems make it possible to recover precious metal that is not absorbed by the parts. This effectively prevents material losses.

Read the full article in MO 11-2023 or online here!

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