Pfeiffer Vacuum+Fab Solutions presents the HiCube Neo RGA

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The HiCube Neo RGA combines a HiCube Neo vacuum pump unit and a PrismaPro mass spectrometer in a compact system for residual gas analysis.

An integrated turbomolecular vacuum pump generates the vacuum level required for mass spectrometry. This enables the PrismaPro to detect and analyze specific mass ranges of gas molecules and thus provide data for process monitoring or quality control. Residual gases can thus be precisely identified and analyzed. The HiCube Neo RGA works in a wide pressure range from atmospheric pressure to high vacuum. It can be used in coating and for analytical tasks, for example.

Integrated safety functions

The HiCube Neo RGA has several built-in safety mechanisms to ensure stable operation and to protect the system components. The system also includes a vacuum gauge for continuous monitoring of the total pressure. If the pressure exceeds a predefined safety threshold, the filament in the mass spectrometer switches off automatically. This prevents damage to the filament due to high pressure. It is also possible to equip the system with an integrated shut-off valve.

Various connection options

The HiCube Neo RGA offers both digital and analog inputs and outputs so that data from additional sensors can be included in the analysis. The PV MassSpec software provides quick and easy access to the measurements. The HiCube Neo RGA is designed for plug & pump operation and is quick to set up. For applications that require gas analysis at multiple locations, the system can be mounted on a trolley and moved between different workstations without disassembly.

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