The MV Positrap vacuum inlet traps can be easily customized by users to remove all process by-products from precursors such as TMA, TiCl, DeZ and H2S, including particulates and unreacted precursors. They are suitable for many atomic layer deposition (ALD) applications from research labs to pilot plant systems and are available in sizes from 102 mm to 203.2 mm diameter, according to the company. Connection sizes range from NW-25 to NW-50 to protect vacuum pumps and lines with flow rates from approximately 42.475 to 127.425 m³/h.
Mass-Vac offers the inlet traps with interchangeable filter elements. These include stainless steel gauze for particles, activated carbon for the adsorption of unreacted precursors, soda lime for acid neutralization, sulfatreat for H2Sneutralization and ammoniasorb for NH3 and amines.