The new series consists of analog capacitive vacuum gauges that can measure over four decades in the full measuring range between 0.1 and 1,000 Torr and is available in heated and unheated versions. The gauges are ideally used in combination with pressure regulating valves and can be used for applications such as dry etching, CVD or ALD processes. They can also be used in analytics, R&D and other industries. Five versions are available for this expansion of the product family: 36x, 37x, 38x, 39x and 30x. All products in the series comply with the semi-S2 standard.
The new series offers options for processes with different temperatures. 36x is an unheated version for measurements at ambient temperature with an accuracy of 0.2 %. Temperature-controlled variants are available for temperatures of 45, 100, 160 and 200 °C. The 45 °C variant offers an accuracy of 0.15 %. The other temperature-controlled variants offer a higher measuring accuracy of 0.4 % in high-temperature or hot gas processes than comparable measuring devices.
A diaphragm sensor forms the heart of the measuring device. It is protected by a ceramic shield, which is applied by atomic layer deposition (ALD). This protects the sensor from both hot process gases and corrosion. This ensures reliability and accuracy as well as sensor service life, even under plasma conditions. Sensor drift is also reduced.