The turbomolecular vacuum pump integrated into the unit generates the vacuum level required for mass spectrometry. This enables the mass spectrometer to detect and analyze specific mass ranges of gas molecules and thus provide data for process monitoring or quality control.
Detecting and identifying residual gases
This system allows residual gases to be precisely identified and analyzed, as the supplier reports. The Hicube Neo RGA operates in a wide pressure range from atmospheric pressure to high vacuum. It can be used in numerous applications, for example in coating and for various analytical tasks.
The residual gas analysis system has several built-in safety mechanisms to ensure stable operation and to protect the components. It also includes a vacuum gauge for continuous monitoring of the total pressure. If the pressure exceeds a predefined safety threshold, the system automatically switches off the filament in the mass spectrometer. This prevents damage to the filament due to excessive pressure, which can extend the service life and reduce the frequency of replacement. It is also possible to equip the residual gas analysis system with an integrated shut-off valve.
Numerous connection options for sensors
The Hicube Neo RGA residual gas analysis system offers numerous connection options for the integration of external sensors and monitoring equipment. It supports both digital and analog inputs and outputs so that data from additional sensors - such as additional vacuum gauges - can be included in the analysis.
The built-in touch display provides direct access to the measurement data and displays signals from connected components. The PV Massspec software also enables quick and easy access to the measurements.
Optional recipient heater eliminates residual gases
In addition, the residual gas analysis system can be adapted to various applications, from leak detection to vacuum furnaces. One such option is an integrated recipient heater that helps to release adsorbed gases. By vaporizing these gases and removing them from the system, the heater reduces contamination and minimizes background signals that could affect measurement accuracy.
The Hicube Neo RGA residual gas analysis system is designed for plug & pump operation and is quick to set up. For applications that require gas analysis at multiple locations, the system can be mounted on a trolley and easily transported. In this way, it can be moved between different workstations without disassembly.