Alixlabs Expands Cleanroom Capacity in Lund

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The Swedish semiconductor technology company Alixlabs is expanding its cleanroom space at the Rise Pronano research facility in Lund by 400 m². The additional capacity is intended to support the testing of the atomic pitch splitting process with industrial customers and its transition to commercial application.

With 400 m² of additional cleanroom space, Alixlabs is creating room for the further development of the Atomic Pitch Splitting (APS) process.
With 400 m² of additional cleanroom space, Alixlabs is creating room for the further development of the Atomic Pitch Splitting (APS) process. (Photo: Alixlabs)

The additional space is intended for equipment used to process semiconductor wafers and validate manufacturing processes as part of customer-specific beta tests. With this expansion, the company is preparing to transition its Atomic Pitch Splitting (APS) process from development to applications in industrial semiconductor manufacturing.

According to Jonas Sundqvist, CEO of Alixlabs, the additional cleanroom space provides the infrastructure needed to expand beta activities, support customers in evaluating the processes, and investigate their potential applications in a production-relevant environment.

The APS process is based on a fast atomic layer etching (ALE) technique and is designed for the fabrication of particularly small and precise semiconductor structures. It is intended to enable high-resolution patterning while reducing the complexity of the process steps.

With the expanded cleanroom capabilities, semiconductor customers can evaluate the approach with regard to future chip manufacturing requirements. The focus is on wafer processing, process validation, and assessing the methods’ suitability for industrial manufacturing workflows.

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