The cleaning medium is recycled liquid carbon dioxide. In combination with process gas from Linde, the cleanroom-compatible process has the Green Screen certificate for cleaners and degreasers from Clean Production Action, an independent, non-profit organization. With regard to particulate residual contamination, surface cleanliness class (SCC) 1 is reproducibly achieved, and even SCC 0.1 for already wet-chemically ultra-fine cleaned parts. In terms of residual filmic contamination, the cleaning results are comparable to those of other ultra-fine cleaning processes such as wet-chemical and plasma cleaning or vacuum bake-out. For cleaning trials and the design of process parameters, acp provides a cleanroom test centre up to cleanroom class ISO 5.
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Hall 10, stand C04